Apparatus and method for manufacturing halogen gas and halogen gas recovery and circulatory system

A method for manufacturing halogen gas, comprising the steps of:

• introducing gas expressed in the chemical formula AiXj (A represents metallic element or semiconductor element;
• X represents halogen element;
• and i and j represent integers) into a reaction container in vacuum;
• generating plasmas in the reaction container so as to produce a plasma chemical reaction;
• collecting fine particles produced by the plasma chemical reaction and containing an element other than halogen element as the major constituent to a fine particle collecting part installed in the reaction container or in a fine particle collection container connecting with the reaction container so as to proceed the plasma chemical reaction, thereby generating halogen gas in the reaction container.

A method for manufacturing halogen gas, comprising the steps of:

• introducing gas expressed in the chemical formula AkXlOm (A represents metallic element or semiconductor element;
• X represents halogen element;
• O represents oxygen;
• and k, l, and m represent integers) into a reaction container in vacuum;
• generating plasmas in the reaction container so as to produce a plasma chemical reaction;
• collecting fine particles produced by the plasma chemical reaction and containing an element other than halogen element as the major constituent to a fine particle collecting part installed in the reaction container or in a fine particle collection container connecting with the reaction container so as to proceed the plasma chemical reaction, thereby generating halogen gas in the reaction container.

A method for manufacturing halogen gas, comprising the steps of:

• introducing gas expressed in the chemical formula ArXsNt (A represents metallic element or semiconductor element;
• X represents halogen element;
• N represents nitrogen;
• and r, s, and t represent integers) into a reaction container in vacuum;
• generating plasmas in the reaction container so as to produce a plasma chemical reaction;
• collecting fine particles produced by the plasma chemical reaction and containing an element other than halogen element as the major constituent to a fine particle collecting part installed in the reaction container or in a fine particle collection container connecting with the reaction container so as to proceed the plasma chemical reaction, thereby generating halogen gas in the reaction container.