# US 2009/0260750 A1 · Molecular transfer printing using block copolymers > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2009/0260750 A1 - Document ID: US20090260750A1 - Status: Published application - Kind: A1 - Application number: 12/416,816 - Filed: 2009-04-01 - Published: 2009-10-22 - Earliest claimed: 2008-04-01 - Assignees: Wisconsin Alumni Research Foundation - Inventors: Paul Franklin Nealey; Shengxiang Ji - Web page: https://patentgrep.com/patent/US20090260750A1 ## CPC - G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping} - B82Y 30/00: Nanotechnology for materials or surface science, e.g. nanocomposites - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES ## Abstract Methods of creating and transferring chemical patterns and physical patterns of deposited materials or molecules using block copolymers are provided. The methods involve providing block copolymer materials blended with one or more transfer molecules or inks. The differences in chemistry of the blocks of the copolymer that result in micro-phase separation (e.g., self-assembly into nanoscale domains) also allow inks to be sequestered into specific blocks. By designing the ink molecules to react, adsorb, or otherwise interact with a second substrate, inks are transferred to the second substrate in a pattern dictated by the pattern of block copolymer domains present at the surface of the block copolymer film. ## Claims ### Claim 1 A method of printing a chemical pattern on a substrate comprising: providing a block copolymer/ink blend film, said blend film comprising a microphase-separated block copolymer material; at least one ink preferentially segregated in at least one of the blocks of the block copolymer material film, and transferring at least one ink to a transferee substrate to thereby print a chemical pattern on the transferee substrate, wherein the chemical pattern is defined by the microphase-separated domains of the block copolymer at a surface of the blend film. ### Claim 2 (depends on 1) The method of claim 1 wherein providing a block copolymer/ink blend film comprises directing the assembly of a block copolymer film on a first chemically patterned substrate. ### Claim 3 (depends on 1) The method of claim 1 wherein the at least one ink is transferred to the transferee substrate by a chemical reaction at the surface of the transferee substrate. ### Claim 4 (depends on 3) The method of claim 3 wherein the at least one ink is transferred to the transferee substrate by adsorption onto the transferee substrate. ### Claim 5 (depends on 1) The method of claim 1 wherein transferring the at least one ink comprises physically contacting the blend film with the transferee substrate. ### Claim 6 (depends on 1) The method of claim 1 wherein transferring the at least one ink comprises heating the blend film to at least 5° C. above the glass transition temperatures of its component copolymers. ### Claim 7 (depends on 1) The method of claim 1 wherein at least a portion of blend film surface is without topographical features, wherein said portion includes multiple features of the pattern to be transferred. ### Claim 8 (depends on 1) The method of claim 1 wherein providing the block copolymer/ink blend film comprises assembling a block copolymer film on a first substrate. ### Claim 9 (depends on 8) The method of claim 8 wherein the pattern in the block copolymer film at the interface with the first substrate differs from the pattern in the block copolymer film at a free surface of the film. ### Claim 10 (depends on 1) The method of claim 1 wherein the at least one ink comprises a compound having a first functional group to interact with the transferee substrate and a second functional group to polymerize and/or conjugate another molecule to the transferee substrate. ### Claim 11 (depends on 1) The method of claim 1 wherein transferring the at least one ink comprises conformally depositing a transferee substrate material on at least a portion of the blend film. ### Claim 12 (depends on 1) The method of claim 1 wherein at least one ink molecule comprises a homopolymer of the one of the components of the block copolymer. ### Claim 13 (depends on 1) The method of claim 1 where at least one ink molecule comprises a nanoparticle or a non-volatile small molecule. ### Claim 14 (depends on 1) The method of claim 1 wherein only a subset of microphase separated domains of the block copolymer blend film are inked. ### Claim 15 (depends on 1) The method of claim 1 wherein all of the microphase separated domains of the block copolymer film are inked. ### Claim 16 A method of generating a replica of a chemical pattern, comprising: providing a first substrate having a master template comprising a microphase-separated block copolymer material and at least one ink preferentially segregated in at least one of the blocks of the block copolymer material film, transferring at least one ink to a transferee substrate to thereby print a chemical pattern on a transferee substrate, wherein the chemical pattern is defined by the microphase-separated domains of the block copolymer at a surface of the blend film; and directing assembly of a block copolymer film on the transferee substrate based on the chemical pattern printed thereon to thereby form a replica of the master template. ### Claim 17 (depends on 16) The method of claim 16 further comprising directing the assembly of a block copolymer film on a chemically nanopatterned surface to generate the master template. ### Claim 18 (depends on 16) The method of claim 16 wherein the first substrate comprises a lithographically patterned surface. ### Claim 19 (depends on 16) The method of claim 16 further comprising reusing the master template to generate one or more additional replicas. ### Claim 20 (depends on 16) The method of claim 16 further comprising, after printing a chemical pattern on the transferee substrate, regenerating the master template on the first substrate. ### Claim 21 (depends on 16) The method of claim 16 wherein the transferee substrate comprises inked and uninked regions. ### Claim 22 (depends on 21) The method of claim 21 further comprising filling the uninked regions with an ink molecule. ### Claim 23 A method of printing a chemical pattern on a substrate comprising: providing a polymer/ink blend film, said blend film comprising a domain-separated polymer material; at least one ink preferentially segregated in at least one of the domains of the blend film, and transferring at least one ink to a transferee substrate to thereby print a chemical pattern on the transferee substrate, wherein the chemical pattern is defined by the separated domains of the block copolymer at a surface of the blend film.