# US 2009/0260566 A1 · Mask support, mask assembly, and assembly comprising a mask support and a mask > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2009/0260566 A1 - Document ID: US20090260566A1 - Status: Published application - Kind: A1 - Application number: 12/244,488 - Filed: 2008-10-02 - Published: 2009-10-22 - Earliest claimed: 2008-04-18 - Assignees: Applied Materials, Inc. - Inventors: Heike Landgraf; Uwe Schuessler; Stefan Bangert - Web page: https://patentgrep.com/patent/US20090260566A1 ## CPC - C23C 14/042: {using masks} - C23C 14/04: Coating on selected surface areas, e.g. using masks - G03F 7/12: Production of screen printing forms or similar printing forms, e.g. stencils - B05C 21/005: {Masking devices (stencils B05C17/06; masking devices for which the means for applying liquids or other fluent material is spraying or is not important B05B12/20)} - H05B 33/10: Apparatus or processes specially adapted to the manufacture of electroluminescent light sources - Y10T 29/49826: Assembling or joining - Y10T 29/49863: with prestressing of part - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - B05C: APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (spraying apparatus, atomising apparatus, nozzles B05B; plant for applying liquids or other fluent materials to objects by electrostatic spraying B05B5/08) - H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract A mask support 10 comprises a frame element 20 and an elastic element 30. The elastic element 30 is fixed to the frame element 20. The elastic element 30 is a component integrally formed of a flexible material. It comprises a lever or arm portion 37 having a first engagement protrusion 38 extending in an angle of approximately 90° from the free end of the arm portion 37. A mask assembly 40 comprises a laminar mask 41, e.g. manufactured from a thin metal foil, and connecting elements 42. The connecting elements 42 include an engagement portion 43 for engagement with the engagement protrusion 38 of the elastic element 30. The mask 41 may be attached/stretched to the mask support 10 as well as to detached from the mask support 10 comfortably. ## Claims ### Claim 1 A mask support for supporting a mask, particularly for supporting a laminar mask for use in an OLED coating device, comprising a frame element and a plurality of elastic elements; wherein both a first elastic element and a second elastic element of said plurality of elastic elements comprise a first engagement means arranged at said first elastic element and a said second elastic element, respectively, for engagement with a corresponding second engagement means provided at said mask assembly for carrying said mask; wherein said elastic elements are configured for fixing said mask to said frame element and for stretching said mask supported in said frame element by pushing an edge portion of said mask away from said frame element, and said first elastic element and said second elastic element are arranged adjacent to each other along a substantially straight edge of said frame element. ### Claim 2 (depends on 1) The mask support of claim 1, wherein said elastic elements are configured for detachably attaching said mask to said frame element. ### Claim 3 (depends on 1) The mask support of claim 1, wherein both said first elastic element and said second elastic element comprise a lever or arm portion, and said first engagement means of said first elastic element and said first engagement means of said second elastic element comprise a protrusion extending in an angle from said lever or arm portion. ### Claim 4 (depends on 1) The mask claim 1, wherein both first elastic element and said second elastic element comprise a curved portion arranged between said lever portion and a mounting portion for mounting said first elastic element and said second elastic element, respectively, to said frame element. ### Claim 5 (depends on 4) The mask support of claim 4, wherein said first elastic element and said second elastic element have a different structure. ### Claim 6 (depends on 5) The mask support of claim 5, wherein said curved portion of said first elastic element and said curved portion of said second elastic element comprise a different number of curves. ### Claim 7 (depends on 1) The mask support of claim 1, wherein said first engagement means of said first elastic element and the first engagement means said second elastic element are movable relative to said frame element at least from a first position in which the respective elastic element is in a released state to a second position in which the elastic element is in a compressed state for locking the mask to the frame element and stretching said mask. ### Claim 8 (depends on 1) The mask support of claim 1, wherein said first engagement means of said first elastic element and said first engagement means of said second elastic element are rotatably arranged at said frame element. ### Claim 9 (depends on 1) The mask support of claim 1, wherein both said first elastic element and said second elastic element are integrally formed of a flexible material. ### Claim 10 (depends on 1) The mask support of claim 1, wherein both said first elastic element and said second element are arranged along at least a marginal edge of said frame element. ### Claim 11 (depends on 1) The mask support of claim 1, wherein said first elastic element and said second elastic element are configured to exert different stretching forces to said mask assembly. ### Claim 12 (depends on 1) The mask support of claim 1, wherein at least a portion of said first elastic element and a portion of said second elastic element are made of different materials. ### Claim 13 (depends on 1) The mask support of claim 1, wherein at least a portion of said first elastic element and a portion of said second elastic element have different thickness. ### Claim 14 (depends on 1) A mask assembly provided for attaching a mask to a mask support according to claim 1, wherein said connecting means comprises at least a second engagement means for mutual engagement with the first engagement means of said mask support. ### Claim 15 (depends on 14) The mask assembly of claim 14, wherein said second engagement means comprises a cramp formed by bending at least an edge portion of said mask assembly relative to the surface of the mask.