# US 2009/0260448 A1 · Apparatus for Measuring Pressure by Using Diaphragm and Method of Pressure Measurement by Using Diaphragm

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- Number: US 2009/0260448 A1
- Document ID: US20090260448A1
- Status: Published application
- Kind: A1
- Application number: 12/345,054
- Filed: 2008-12-29
- Published: 2009-10-22
- Earliest claimed: 2008-04-18
- Assignees: Korea Research Institute of Standards and Science
- Inventors: Seung Soo Hong; Yong Hyeon Shin; Jin Tae Kim
- Web page: https://patentgrep.com/patent/US20090260448A1

## CPC

- G01L 9/0072: {using variations in capacitance}
- G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G)

## Abstract

The present invention relates to a capacitance type pressure measurement apparatus by using a diaphragm, and more specifically to an apparatus for measuring pressure by using a diaphragm capable of measuring pressure of atmospheric pressure or less as well as pressure of atmospheric pressure or more without having a getter pump by fixedly mounting a pressure variable container on a sensor housing having a diaphragm mounted therein.

## Claims

### Claim 1

An apparatus for measuring pressure by using a diaphragm comprising:
a diaphragm sensor including a sensor housing formed with a first opening and a second opening, a diaphragm mounted between the first opening and the second opening to spatially isolate the first opening and the second opening from each other and provided with a conducive part, an electrode substrate formed with a through hole to form a channel between the second opening and the diaphragm and mounted between the second opening and the diaphragm, and an electrode attached to the electrode substrate to face the diaphragm; and
a pressure variable container formed with a third opening and a fourth opening and on which the sensor housing is fixed to communicate the second opening with the third opening.

### Claim 2 (depends on 1)

The apparatus according to claim 1, further comprising:
a gate valve opening and closing the fourth opening;
a gas inlet pipe provided with a gas flux control valve for controlling gas amount flowed in the pressure variable container and connected to the pressure variable container; and
a container pressure measuring gauge for measuring pressure inside the pressure variable container when the pressure variable container is closed by the gate valve.

### Claim 3 (depends on 1)

The apparatus according to claim 1, wherein the diaphragm is mounted to be spaced by a predetermined distance from the first opening so that it can convexedly be bent toward the first opening without contacting the first opening.

### Claim 4 (depends on 1, 2, 3)

The apparatus according to any one of claims 1 to 3, wherein the sensor housing is formed with a flange part to be closely fixed to the pressure variable container.

### Claim 5 (depends on 2)

A method of pressure measurement by using the apparatus for measuring pressure as claimed in claim 2 comprising the steps of:
closing the fourth opening by an operation of the gate valve;
flowing gas in the pressure variable container through the gas inlet pipe;
controlling pressure inside the pressure variable container to be constant pressure by using the gas flux control valve; and,
positioning the first opening in a pressure measurement space higher than pressure inside the pressure variable container controlled in the pressure control step.