# US 2009/0260436 A1 · Angular velocity sensor element

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- Number: US 2009/0260436 A1
- Document ID: US20090260436A1
- Status: Published application
- Kind: A1
- Application number: 12/382,274
- Filed: 2009-03-12
- Published: 2009-10-22
- Earliest claimed: 2008-03-28
- Assignees: TDK Corporation
- Inventors: Kenichi TOCHI; Takao NOGUCHI; Ken UNNO; Kazuya MAEKAWA
- Web page: https://patentgrep.com/patent/US20090260436A1

## CPC

- G01C 19/5642: using vibrating bars or beams
- G01C: MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level G01F; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves G01S)

## Abstract

An angular velocity sensor element is provided which is capable of preventing even transmission of sudden externally-applied vibration to an element portion by absorbing the vibration. An angular velocity sensor element 2 according to the present embodiment has a fixing portion 21 in the form of a frame, an element portion 20 disposed in the frame of the fixing portion 21 and having vibrating arms 21 to 24 in a drive system and a detection system, and a connecting portion 25 formed as a fixed-fixed beam having its both ends connected to the fixing portion 21 and having its intermediate portion connected to the element portion 20.

## Claims

### Claim 1

An angular velocity sensor element comprising:
a fixing portion in the form of a frame;
an element portion disposed in the frame of the fixing portion and having vibrating arms in a drive system and a detection system; and
a connecting portion formed as a fixed-fixed beam having its both ends connected to the fixing portion and having its intermediate portion connected to the element portion.

### Claim 2 (depends on 1)

The angular velocity sensor element according to claim 1, wherein the width of the connecting portion is smaller than the width of the vibrating arms of the element portion.

### Claim 3 (depends on 1)

The angular velocity sensor element according to claim 1, wherein the vibrating arms, the fixing portion and the connecting portion in the element portion are formed integrally with each other.

### Claim 4 (depends on 1)

The angular velocity sensor element according to claim 1, wherein the element portion includes:
a transmission arm having its both ends fixed to the connecting portions;
a drive arm in the form of a fixed-free beam connected to the transmission arm; and
a detection arm in the form of a fixed-free beam connected to the transmission arm at a position different from that of the drive arm.

### Claim 5 (depends on 4)

The angular velocity sensor element according to claim 4, wherein the connecting portion is in the form of a fixed-fixed beam perpendicularly extending straight from the transmission arm.

### Claim 6

An angular velocity sensor element comprising:
a fixing portion in the form of a frame;
an element portion disposed in the frame of the fixing portion and having vibrating arms in a drive system and a detection system; and
a connecting portion formed of a material having an elastic modulus lower than those of materials of the fixing portion and the element portion, the connecting portion connecting the fixing portion and the element portion to each other.

### Claim 7 (depends on 6)

The angular velocity sensor element according to claim 6, wherein the element portion includes:
a transmission arm having its both ends fixed to the connecting portions;
a drive arm in the form of a fixed-free beam connected to the transmission arm; and
a detection arm in the form of a fixed-free beam connected to the transmission arm at a position different from that of the drive arm.

### Claim 8 (depends on 7)

The angular velocity sensor element according to claim 7, wherein the connecting portion is in the form of a fixed-fixed beam perpendicularly extending straight from the transmission arm.