# US 2009/0260427 A1 · Measuring Head for Nanoindentation Instrument and Measuring Method Using Same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2009/0260427 A1 - Document ID: US20090260427A1 - Status: Published application - Kind: A1 - Application number: 11/721,997 - Filed: 2005-11-16 - Published: 2009-10-22 - Earliest claimed: 2004-12-23 - Assignees: CSM Instruments SA - Inventors: Jacques Woirgard; Bertand Bellaton; Richard Consiglio - Web page: https://patentgrep.com/patent/US20090260427A1 ## CPC - G01N 3/42: by performing impressions under a steady load by indentors, e.g. sphere, pyramid (G01N3/54 takes precedence) - G01Q 60/366: {Nanoindenters, i.e. wherein the indenting force is measured} - G01N 2203/0051: Piezoelectric means - G01N 2203/0286: Miniature specimen; Testing on microregions of a specimen - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - G01Q: SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM] ## Abstract A measuring head for a nano-indentation instrument capable of positioning a sample relatively to the measuring head, which includes a measuring axis, a reference axis and a component for detecting a depth of penetration of an indentor into the sample. The measuring and reference axes are attached to a frame for connection to the instrument. The measuring axis incorporates an actuator and includes the indentor, the reference axis incorporates an actuator and includes a reference tip, and the measuring and reference axes each have a component for detecting a force applied by its actuator. Penetration depth is detected by measuring a displacement of the indentor relatively to the reference tip. ## Claims ### Claim at position 1 1-13. (canceled) ### Claim 14 A measuring head for a nano-indentation instrument having positioning means capable of positioning a sample relatively to said measuring head, which comprises: a measuring axis attached to a frame intended to be connected to said instrument, incorporating first actuating means and including an indentor; means for detecting a depth of penetration of said indentor in said sample; and, a reference axis also attached to said frame, incorporating second actuating means and including a reference tip; wherein said measuring axis and said reference axis each comprise means for detecting a force applied by said first and second actuating means, and wherein detection of said penetration depth is performed by measuring a displacement of said indentor relatively to said reference tip. ### Claim 15 (depends on 14) The measuring head according to claim 14, wherein said measuring axis and said reference axis comprise first spring components, positioned between said first actuating means and said indentor, and second spring components positioned between said second actuating means and said reference tip, respectively, as well as sensors for a displacement of the indentor relatively to said first actuating means, from said reference tip relatively to said second actuating means, respectively. ### Claim 16 (depends on 15) The measuring head according to claim 15, wherein said displacement sensors are capacitive sensors. ### Claim 17 (depends on 14) The measuring head according to claim 14, wherein said detection of said penetration depth is also performed with a capacitive sensor. ### Claim 18 (depends on 16) The measuring head according to claim 16, wherein said capacitive sensors are differential type sensors. ### Claim 19 (depends on 14) The measuring head according to claim 14, wherein said first and second actuating means are piezoelectric type actuating means. ### Claim 20 (depends on 14) The measuring head according to claim 14, wherein said measurement axis and said reference axis are symmetrical. ### Claim 21 (depends on 14) The measuring head according to claim 14, wherein said measurement axis and said reference axis are made in materials, respectively, with a very low thermal expansion coefficient. ### Claim 22 (depends on 14) The measuring head according to claim 14, wherein it comprises a first servo-control circuit of said second actuating means in order to control a force applied on said sample by said reference tip. ### Claim 23 (depends on 14) The measuring head according to claim 14, wherein it comprises a second servo-control circuit of said first actuating means in order to control a force applied by the indentor on the sample. ### Claim 24 (depends on 14) The measuring head according to claim 14, wherein it comprises a second servo-control circuit of said first actuating means in order to control said penetration depth of said indentor. ### Claim 25 (depends on 17) The measuring head according to claim 17, wherein said capacitive sensors are differential type sensors. ### Claim 26 (depends on 15) The measuring head according to claim 15, wherein said first and second actuating means are piezoelectric type actuating means. ### Claim 27 (depends on 15) The measuring head according to claim 15, wherein said measurement axis and said reference axis are symmetrical. ### Claim 28 (depends on 15) The measuring head according to claim 15, wherein said measurement axis and said reference axis are made in materials, respectively, with a very low thermal expansion coefficient. ### Claim 29 (depends on 15) The measuring head according to claim 15, wherein it comprises a first servo-control circuit of said second actuating means in order to control a force applied on said sample by said reference tip. ### Claim 30 (depends on 15) The measuring head according to claim 15, wherein it comprises a second servo-control circuit of said first actuating means in order to control a force applied by the indentor on the sample. ### Claim 31 (depends on 15) The measuring head according to claim 15, wherein it comprises a second servo-control circuit of said first actuating means in order to control a force applied by the indentor on the sample. ### Claim 32 (depends on 14) A nano-indentation measurement method employing the measuring head according to claim 14, comprising steps of: positioning a sample to be analyzed under the measuring head, pre-positioning said sample as well as said first and second actuating means so that said reference tip is in contact with said sample and said indentor is slightly retracted relatively to a surface of said sample, controlling said second actuating means so that said reference tip applies a given force on said sample, controlling said first actuating means in order to bring said indentor in contact with said sample, carrying out a measurement by controlling said first actuating means so that said indentor applies an intended force on said sample and while measuring simultaneously said penetration depth of said indentor into said sample, and retracting said indentor and then said reference tip and then said sample at the end of said measurement. ### Claim 33 (depends on 32) The method according to claim 32, wherein said measurement comprises a plurality of penetration cycles according to a given sequence.