# US 2009/0260207 A1 · Inkjet head, method of manufacturing inkjet head, and inkjet recording apparatus

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- Number: US 2009/0260207 A1
- Document ID: US20090260207A1
- Status: Published application
- Kind: A1
- Application number: 12/490,145
- Filed: 2009-06-23
- Published: 2009-10-22
- Earliest claimed: 2003-09-26
- Assignees: FUJIFILM Corporation
- Inventors: Tsuyoshi MITA; Kazuo Sanada
- Web page: https://patentgrep.com/patent/US20090260207A1

## CPC

- B41J 2/1634: {laser machining}
- B41J 2/161: {of film type, deformed by bending and disposed on a diaphragm}
- B41J 2/1623: {bonding and adhesion}
- B41J 2/1626: {etching}
- B41J 2/1632: {machining}
- B41J 2/1646: {thin film formation by sputtering}
- B41J 2002/14459: {Matrix arrangement of the pressure chambers}
- Y10T 29/42: Piezoelectric device making
- Y10T 29/49401: Fluid pattern dispersing device making, e.g., ink jet
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

An inkjet head, comprising: a pressure chamber which are arranged two-dimensionally, and deformed by pressure generating unit and discharging ink from nozzles communicated with the pressure chamber; and a piezoelectric element which is included in the pressure generating unit, said piezoelectric element including a thin film piezoelectric element formed by means of a thin film forming technique.

## Claims

### Claim 1

A method of manufacturing an inkjet head, comprising the steps of:
two-dimensionally arranging a pressure chamber, deformed by a pressure generating unit comprising a piezoelectric element and discharging ink from nozzles communicated with the pressure chamber; and
forming said piezoelectric element by means of a thin film forming technique.

### Claim 2 (depends on 1)

The method of manufacturing an inkjet head according to claim 1, further comprising the steps of:
forming a portion of said pressure chamber by a vibration plate; and
manufacturing said pressure generating unit by bonding said thin film piezoelectric element to said vibration plate.

### Claim 3 (depends on 2)

The method of manufacturing an inkjet head according to claim 2, further comprising a step of:
manufacturing said pressure generating unit by forming said thin film piezoelectric element onto a substrate, bonding said thin film piezoelectric element formed on said substrate with said vibration plate, and then removing said substrate.

### Claim 4 (depends on 2)

The method of manufacturing an inkjet head according to claim 2, further comprising a step of:
manufacturing said vibration plate by processing stainless steel, or manufacturing integrally with the pressure chambers by using silicon.

### Claim 5 (depends on 2)

The method of manufacturing an inkjet head according to claim 2, further comprising a step of:
forming a groove on said vibration plate in said pressure generating unit, on the side bonded with said thin film piezoelectric element.