Liquid crystal device and method of manufacturing the same
AssigneeCanon Kabushiki Kaisha
InventorsAkira Sakai, Yohei Ishida, Yasufumi Asao, Hirokatsu Miyata, Philip J. Martin
Life of this patent
Estimating the term…
Abstract
A liquid crystal device has a pair of substrates, an alignment film formed at least on one of the pair of substrates and liquid crystal showing an orientation defined by the alignment film. The alignment film is a carbon film having a cross-sectional structure inclined relative to the direction of the film thickness by a constant angle.
Claims5
A liquid crystal device having a pair of substrates, an alignment film formed at least on one of the pair of substrates and liquid crystal showing an orientation defined by the alignment film, wherein the alignment film is a carbon film having a cross-sectional structure inclined relative to the direction of film thickness.
A method of manufacturing a liquid crystal device including liquid crystal sandwiched between a pair of substrates, comprising a step of forming an alignment film at least on one of the pair of substrates and a step of arranging the pair of substrates opposite to each other and bonding them together with liquid crystal sandwiched between them, wherein the step of forming the alignment film is a step of forming a carbon film on either of the pair of substrates and includes steps (a) through (c) below:
- (a) a step of generating a carbon plasma beam by arc discharge, using graphite as cathode;
- (b) a step of curving the carbon plasma beam by means of a magnetic field;
- and
- (c) a step of irradiating the carbon plasma beam onto the substrate from a direction inclined relative to the surface of the substrate.
Dependencies are inferred from the claim text.