Method for making zinc oxide nano-structrure
AssigneesTsinghua University, Hon Hai Precision Industry Co., Ltd.
InventorsKai-Li Jiang, Qun-Qing Li, Shou-Shan Fan
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Abstract
A method for making zinc oxide nano-structure, the method includes the following steps. Firstly, providing a growing device, the growing device comprising a heating apparatus and a reacting room. Secondly, providing a growing substrate and forming a metal layer thereon. Thirdly, depositing a catalyst layer on the metal layer. Fourthly, placing the growing substrate into the reacting room together with a quantity of zinc source material. Fifthly, introducing a oxygen-containing gas into the reacting room. Lastly, heating the reacting room to a temperature range of 500˜1100° C.
Claims17
A method for making zinc oxide nano-structure, the method comprising the following steps of:
- (a) providing a growing substrate and a growing device, the growing device comprising a heating apparatus and a reacting room therein;
- (b) forming a metal layer thereon;
- (c) depositing a catalyst layer on the metal layer;
- (d) placing the growing substrate together with a zinc source material into the reacting room;
- (e) introducing a oxygen-containing gas into the reacting room;
- and
- (f) heating the reacting room to a temperature in the approximate range from 500 to 1100° C.
Dependencies are inferred from the claim text.