Method of forming multiple fins for a semiconductor device
AssigneeAdvanced Micro Devices, Inc.
InventorsZhonghai SHI, David WU, Jingrong ZHOU, Ruigang LI
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AssigneeAdvanced Micro Devices, Inc.
InventorsZhonghai SHI, David WU, Jingrong ZHOU, Ruigang LI
Estimating the term…
A fabrication process for a FinFET device is provided. The process begins by providing a semiconductor wafer having a layer of conductive material such as silicon. A whole-field arrangement of fins is then formed from the layer of conductive material. The whole-field arrangement of fins includes a plurality of conductive fins having a uniform pitch and a uniform fin thickness. Next, a cut mask is formed over the whole-field arrangement of fins. The cut mask selectively masks sections of the whole-field arrangement of fins with a layout that defines features for a plurality of FinFET devices. The cut mask is used to remove a portion of the whole-field arrangement of fins, the portion being unprotected by the cut mask. The resulting fin structures are used to complete the fabrication of the FinFET devices.
A method of manufacturing a semiconductor device, the method comprising:
A method of manufacturing a semiconductor device, the method comprising:
A method of manufacturing a semiconductor device, the method comprising:
Dependencies are inferred from the claim text.