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US 2009/0244686 A1Published application
Microelectromechanical device with spacing layer
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorKostadin Djordjev
Life of this patent
Estimating the term…
Abstract
An interferometric modulating device is provided with a spacing layer positioned between the fixed reflector and the electrode. The spacing layer prevents shorting between the movable reflector and the electrode and provides a filtering cavity to improve color saturation.
Claims29
A device comprising:
- an electrode;
- a fixed reflector;
- a movable reflector comprising an electrically conductive material, wherein an interferometric modulating cavity is defined between the movable reflector and the fixed reflector, the movable reflector being movable between at least a first position, a second position, and a third position;
- and
- a spacing layer positioned between the fixed reflector and the electrode, wherein the spacing layer comprises a filtering cavity configured to improve color saturation of the interferometric modulating cavity.
2 more elements
A device comprising:
- an electrode;
- a fixed reflector;
- a movable reflector comprising an electrically conductive material, wherein an interferometric modulating cavity is defined between the movable reflector and the fixed reflector, the movable reflector being movable between at least a first position, a second position, and a third position;
- and
- a spacing layer positioned between the fixed reflector and the electrode, the spacing laying being greater than or equal to 160 nm in thickness from a cross-sectional view of the device, wherein the spacing layer comprises a filtering cavity configured to improve color saturation of the interferometric modulating cavity.
2 more elements
A device comprising:
- an electrode;
- first means for reflecting light, the first reflecting means being fixed;
- second means for reflecting light, the second reflecting means being movable and comprising an electrically conductive material, wherein an interferometric modulating cavity is defined between the first reflecting means and the second reflecting means, the second reflecting means being movable between at least a first position, a second position, and a third position;
- and
- means for separating the first reflecting means and the electrode, wherein the means for separating the first reflecting means and the electrode comprises a filtering cavity configured to improve color saturation of the interferometric modulating cavity.
2 more elements
A method of making a device for modulating light, the method comprising:
- forming an electrode;
- forming a spacing layer;
- forming a fixed reflector;
- and
- forming a movable reflector comprising an electrically conductive material;
- wherein an interferometric modulating cavity is defined between the movable reflector and the fixed reflector, the movable reflector being movable between at least a first position, a second position, and a third position;
- and
- wherein the spacing layer comprises a filtering cavity configured to improve color saturation of the interferometric modulating cavity.
5 more elements
Dependencies are inferred from the claim text.