Image sensor with an improved sensitivity
AssigneeSTMicroelectronics S.r.l.
InventorJerome Vaillant
Life of this patent
Estimating the term…
Abstract
An image sensor having a surface intended to be illuminated and pixels, each pixel including a photosensitive area formed in an active area of the substrate, at least one first pixel including a first microlens located on the surface, the sensor including at least one second pixel including a transparent portion forming a pedestal located at least partly on the surface and a second microlens at least partially covering the pedestal.
Claims9
An image sensor comprising a surface to be illuminated and pixels each pixel comprising a photosensitive area formed in an active area of a substrate, each pixel being associated with one microlens, the microlens of at least one first pixel being located on said surface, the microlens of at least one second pixel at least partially covering a transparent portion forming a pedestal located at least partly on said surface.
A method for forming an image sensor comprising a surface to be illuminated and pixels, each pixel comprising a photosensitive area formed in an active area of a substrate, each pixel being associated with one microlens, comprising:
- forming, for at least one first pixel, a first microlens located on said surface;
- covering said surface and the first microlens with a transparent layer;
- forming in the transparent layer, for at least one second pixel, at least one portion forming a pedestal;
- and
- forming a second microlens at least partially covering the pedestal.
Dependencies are inferred from the claim text.