Liquid jet head, a liquid jet apparatus and a method of manufacturing a liquid jet head
AssigneeSeiko Epson Corporation
InventorAkihito Tsuda
Life of this patent
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Abstract
A piezoelectric element includes a piezoelectric layer disposed between a first electrode and a second electrode. Anti-deformation layers continue from the piezoelectric layers ad contain a less moisture-permeable component than the piezoelectric layer. The piezoelectric layers and the anti-deformation layers are alternately and continuously disposed in the direction of the arrangement of the rows of the pressure generating chambers. The anti-deformation layers are disposed at least in regions opposing a partition member with the vibration plate therebetween. The piezoelectric layer is enclosed by the first electrode, the second electrode and at least either the vibration plate or the anti-deformation layer.
Claims6
A liquid jet head comprising:
- rows of pressure generating chambers communicating with respective nozzle apertures;
- a partition member separating the pressure generating chambers from each other;
- and
- piezoelectric elements opposing the respective pressure generating chambers with a vibration plate therebetween,
- wherein the piezoelectric elements each include a piezoelectric layer disposed between a first electrode and a second electrode, anti-deformation layers continue from the piezoelectric layers and contain a less moisture-permeable component than the piezoelectric layer, and the piezoelectric layers and the anti-deformation layers are alternately and continuously disposed in the direction of the arrangement of the rows of the pressure generating chambers,
- wherein the anti-deformation layers are disposed at least in regions opposing the partition member with the vibration plate therebetween, and
- wherein each piezoelectric layer is enclosed by the first electrode, the second electrode and at least either the vibration plate or the anti-deformation layer.
A method of manufacturing a liquid jet head, the method comprising:
- the step of forming a vibration plate on a substrate in which a flow channel is to be formed;
- the step of forming a first electrode on the vibration plate;
- the step of forming a piezoelectric layer on the vibration plate and the first electrode over the arrangement of rows of the pressure generating chambers;
- the step of forming anti-deformation layers by applying treatment for restraining deformation to the piezoelectric layer in at least regions opposing the partition member with the vibration plate therebetween;
- and
- the step of forming a second electrode on the piezoelectric layer.
Dependencies are inferred from the claim text.