Fabrication of microstructures integrated with nanopillars along with their applications as electrodes in sensors
OwnerGuigen Zhang, Venkataramani Anandan +1inventors
InventorsGuigen Zhang, Venkataramani Anandan, Yeshwanth L. Rao
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Abstract
This invention presents microstructures enhanced with nanopillars. The invention also provides a novel way for manufacturing nanopillar-enhanced microstructures, using conventional microfabrication techniques. In some embodiments, the invention also provides methods of use for the nanopillar-enhanced microstructures.
Claims38
A process for fabricating a nanostructure-enhanced 3D surface, comprising:
- (a) consecutively depositing at least two layers of metallic film on a flat substrate;
- (b) developing a nanoporous template by anodizing the outer metallic layer;
- (c) electrodepositing nanoparticles onto said nanoporous template;
- and
- (d) removing the template.
An integrated micro/nanoscale structure comprising:
- (a) a substantially flat support base;
- (b) a plurality of nanopillars connected directly to the support base, said plurality of nanopillars being substantially vertical in orientation to the support base, and said plurality of nanopillars forming a three-dimensional surface, said nanopillars comprising a height-to-width ratio of 1 to 50.
A microflow channel comprising an interdigitated array of microplanar electrodes, which comprises a first nanoelectrode, said first nanoelectrode comprising:
- (a) a substantially flat support base;
- (b) a plurality of nanopillars connected directly to the support base, said plurality of nanopillars being substantially vertical in orientation to the support base, and said plurality of nanopillars forming a three-dimensional surface, said nanopillars comprising a height-to-width ratio of 1 to 50;
- and
- (c) a second nanoelectrode, said second nanoelectode being a nanoelectrode detector;
- wherein the interdigitated array comprises a detector:electrode repeat, wherein said repeat is repeated at least twice.
Dependencies are inferred from the claim text.