Multilayered piezoelectric element and method of manufacturing the same
AssigneeFUJIFILM Corporation
InventorAtsushi OSAWA
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AssigneeFUJIFILM Corporation
InventorAtsushi OSAWA
Estimating the term…
In a multilayered piezoelectric element, a side insulating film is accurately formed even on a thin multilayered structure. The element includes: a multilayered structure having a step formed on a side surface of the multilayered structure such that an end of an internal electrode is located on a convex portion of either side surface; a side insulating film for covering the end of the internal electrode on the convex portion of the side surface; a first flat electrode formed on one principal surface of the multilayered structure; a second flat electrode formed on the other principal surface of the multilayered structure; a first side electrode formed on a first side surface of the multilayered structure and connected to a first group of electrodes; and a second side electrode formed on a second side surface of the multilayered structure and connected to a second group of electrodes.
A multilayered piezoelectric element comprising:
A method of manufacturing a multilayered piezoelectric element, said method comprising the steps of:
Dependencies are inferred from the claim text.