Wafer thermometer, temperature measuring device, heat treatment device and method for measuring temperature of heat treatment unit

A temperature measuring device comprising:

• a wafer thermometer comprising:
• a wafer having an upper surface divided to a plurality of regions;
• a plurality of temperature sensors arranged at the plurality of regions, respectively;
• a converter provided on the wafer and configured to convert signals output from the plurality of temperature sensors to temperature data;
• a wafer data transmitter provided on the wafer and configured to transmit the temperature data converted by the converter;
• a photoelectric conversion element provided on the wafer and configured to supply a current to the converter and the wafer data transmitter in response to light with which the photoelectric conversion element is irradiated;
• and
• an external data receiver provided to be apart from the wafer and configured to receive the temperature data transmitted from the wafer data transmitter.

A heat treatment device comprising:

• a wafer thermometer comprising:
• a wafer having an upper surface divided to a plurality of regions;
• a plurality of temperature sensors arranged at the plurality of regions, respectively;
• a converter provided on the wafer and configured to convert signals output from the plurality of temperature sensors to temperature data;
• a wafer data transmitter provided on the wafer and configured to transmit the temperature data converted by the converter;
• and
• a photoelectric conversion element provided on the wafer and configured to supply a current to the converter and the wafer data transmitter in response to light with which the photoelectric conversion element is irradiated;
• and
• a chamber comprising a first light source configured to irradiate the photoelectric conversion element with light;
• and
• a heat treatment unit provided in the chamber to heat or cool a processing wafer, the wafer thermometer being configured to detect a temperature of the heat treatment unit.

A method for measuring a temperature of a heat treatment unit, the method comprising:

• providing a wafer thermometer on the heat treatment unit for heating or cooling a processing wafer, the wafer thermometer having a photoelectric conversion element and temperature sensors;
• irradiating the photoelectric conversion element with light;
• measuring a temperature of the heat treatment unit using the wafer thermometer;
• and
• transmitting temperature data showing the measured temperature using power supplied from the photoelectric conversion element.

A wafer thermometer comprising:

• a wafer having an upper surface divided to a plurality of regions;
• temperature sensing means for sensing temperature and arranged at the plurality of regions, respectively;
• converting means for converting signals output from the plurality of temperature sensing means to temperature data and provided on the wafer;
• wafer data transmitting means for transmitting the temperature data converted by the converting means and provided on the wafer;
• and
• photoelectric conversion means for supplying a current to the converting means and the wafer data transmitting means in response to light with which the photoelectric conversion means is irradiated, the photoelectric conversion means being provided on the wafer.