US 2009/0242521 A1 · ON-THE-FLY MANIPULATION OF SPOT SIZE AND CUTTING SPEED FOR REAL-TIME CONTROL OF TRENCH DEPTH AND WIDTH IN LASER OPERATIONS

Abstract

Systems and methods cut trenches of multiple widths in a material using a single pass of a laser beam. A first series of laser pulses cut a work surface of the material at a first cutting speed using a first spot size. In a transition region from a first trench width to a second trench width, a second series of laser pulses sequentially change spot sizes while gradually changing from the first cutting speed to a second cutting speed. Then, a third series of laser pulses continue to cut the work surface at the second cutting speed using a second spot size. The method provides for increased depth control in the transition region. A system uses a selectively adjustable optical component in the laser beam path to rapidly change spot size by adjusting a position of a focal plane with respect to the work surface.

Claims21

Dependent claims

A method for cutting a trench of multiple widths in a material with a single pass of a laser beam, the method comprising:

at a first cutting speed of the laser beam with respect to a work surface of the material, cutting the work surface using a first series of laser pulses, each laser pulse in the first series having a first spot size at the work surface;
in a transition region:
gradually changing from the first cutting speed at a beginning of the transition region to a second cutting speed at an end of the transition region;
and
as the cutting speed gradually changes, cutting the work surface with a second series of laser pulses, wherein the second series of laser pulses sequentially change spot sizes from the first spot size at the beginning of the transition region to a second spot size at the end of the transition region;
and
at the second cutting speed of the laser beam, continuing to cut the work surface using a third series of laser pulses, each laser pulse in the third series having the second spot size.

4 more elements

Dependencies are inferred from the claim text.

On-the-fly manipulation of spot size and cutting speed for real-time control of trench depth and width in laser operations

Life of this patent

On-the-fly manipulation of spot size and cutting speed for real-time control of trench depth and width in laser operations

Life of this patent

Abstract

Claims21