Substrate processing apparatus

A substrate processing apparatus that loads a substrate holding part having many substrates loaded therein into a processing furnace and which performs a predetermined processing to the substrates, the substrate processing apparatus comprising:

• a storage unit that accumulates and stores production information relating to the substrate for each of the processing, the production information being produced when the substrate is processed;
• a display part that displays a production history stored in the storage unit;
• an operation unit that includes a reception part that receives plural selections of the displayed production history and a substrate information switching part that switches to a substrate information screen to show information relating to a state in which the substrates are held the substrate holding part;
• and
• a display control unit that controls such that the information relating to the state in which the substrates are held the substrate holding part with respect to the selected plural production histories is displayed when the substrate information switching part is pressed down.