Tool with Sintered Body Polishing Surface and Method of Manufacturing the Same
OwnerHiroshi Ishizukainventor
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Abstract
An efficiently processible polishing tool, particularly used for a CMP pad conditioner, capable solving problems in a fixing strength for fixing abrasive grains to a base plate and problems in nonuniform polished surface and a method of effectively manufacturing the polishing tool. The polishing tool (1) comprises a polishing part formed of a super abrasive grain sintered body sintered integrally with the lining material of a cemented carbide. The polishing part comprises a plurality of polishing units (2) with top parts. The top parts are positioned on an approximately same plane. The polishing units (2) are formed by forming a linear groove (3) group in the polishing part.
Claims26
An abrasive tool comprising an abrasive part that comprises a layer of sintered superabrasive particles, wherein said abrasive part comprises a plurality of abrasive units that have upper ends arranged on an equal level.
A method for the manufacture of an abrasive tool having an abrasive part that comprises a layer of sintered superabrasive particles, wherein said abrasive part comprises a plurality of abrasive units that have upper ends arranged on an equal level, comprising:
- 1) providing a composite that comprises sintered superabrasive particles that are as a whole joined to a backing material of cemented carbide,
- 2) leveling said composite surface, and
- 3) cutting in said composite surface to form groups of linear grooves and an array of abrasive units along said grooves.
A method for the manufacture of an abrasive tool having an abrasive part that comprises a layer of sintered superabrasive particles, comprising:
- 1) providing a sintered composite composed of a layer of sintered superabrasive particles that are joined integrally to a backing of cemented carbide,
- 2) cutting said composite to yield a segment in a shape of sector,
- 3) collecting a plurality of segments, which are identical in geometry to the one obtained in 2) with an equal central angle,
- 4) arranging said segments closely to each other, so as to form a composite surface in entire circular or annular shape, fixing said segments to a base plate on a flat surface thereof, and
- 5) cutting in said segments to produce an array of abrasive units on said composite, whereby group of grooves are formed parallel to a radial border of each segment as obtained in 4).
Dependencies are inferred from the claim text.