Alignment method of two substrates by microcoils
AssigneeCommissariat a l'Energie Atomique
InventorsMaxime Rousseau, Bernard Viala
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Abstract
Substrates to be aligned comprise microcoils arranged at the level of their facing surfaces. In an alignment phase, power is supplied to at least the microcoils of the first substrate, whereas the inductance of the microcoils of the second substrate is measured. The microcoils are preferably flat microcoils in the form of a spiral or a serpentine.
Claims12
An alignment method of first and second substrates, the first and second substrates each having a surface comprising microcoils, the surface of the first substrate comprising microcoils and facing the surface of the second substrate comprising microcoils, at least the microcoils of the first substrate being power supplied, method comprising:
- displacing the substrates with respect to one another in a plane parallel to the substrates,
- measuring the inductance of the microcoils of the second substrate, and determining the alignment according to the variations of said inductance.
Dependencies are inferred from the claim text.