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US 2009/0214783 A1Published application
Organic Vapor Jet Printing System
AssigneeThe Regents of the University of Michigan
InventorStephen R. Forrest
Life of this patent
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Abstract
An organic vapor jet printing system includes a pump for increasing the pressure of an organic flux.
Claims28
An organic vapor jet printing system, comprising:
- a heated chamber configured to produce an organic flux, the flux including a carrier gas and a vapor of an organic material;
- a source cell configured to introduce the vapor and the carrier gas into the heated chamber;
- a nozzle body configured to direct the flux to a substrate;
- a transport line disposed between the heated chamber and the nozzle body, the transport line configured to convey the flux from the heated chamber to the nozzle body;
- and
- a pump connected to the transport line between the source cell and the nozzle body, the pump configured to pump the flux from the chamber to the transport line and to the nozzle body.
3 more elements
A method of depositing an organic film onto a substrate, comprising:
- heating an organic material to form an organic vapor;
- transporting the organic vapor in a carrier gas from a source cell into a heated chamber;
- heating the heated chamber sufficiently to form a substantially uniform organic flux of the carrier gas and organic vapor by diffusive mixing of the gas and vapor within the heated chamber;
- transporting the organic flux to a nozzle body;
- directing the organic flux to a cooled substrate;
- increasing the pressure of the organic flux with a pump before the organic flux exits the nozzle body, the pump being disposed between the source cell and the nozzle body;
- and
- depositing the organic material onto a surface of the cooled substrate to form an organic film on the substrate.
5 more elements
Dependencies are inferred from the claim text.