Microplasma Array
AssigneeForschungsverbund Berlin E.V.
InventorRoland Gesche
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Abstract
The invention relates to a microplasma array for producing low-temperature plasmas at or close to atmospheric pressure. According to the invention, the walls of holes which are introduced into a substrate (1) at regular intervals from each other and form hollow electrodes (2) are metal-coated, and said hollow electrodes (2) are supplied individually or in groups with electrical excitation in the GHz range from one side of the substrate (1).
Claims20
1-7. (canceled)
A microplasma array for the production of low-temperature plasmas at or near atmospheric pressures wherein the walls of holes made in a substrate at regular intervals with respect to one another forming hollow electrodes are coated with metal, and these hollow electrodes are supplied individually or as a group from one side of the substrate with an electrical excitation in the GHz-region.
A microplasma array for the production of low-temperature plasmas at or near atmospheric pressures wherein the walls of holes made in a substrate at regular intervals with respect to one another forming hollow electrodes are coated with metal, and these hollow electrodes are supplied individually or as a group from one side of the substrate with an electrical excitation in the GHz-region, wherein the diameter of the hollow electrodes is less than 1 mm.
A microplasma array for the production of low-temperature plasmas at or near atmospheric pressures wherein the walls of holes made in a substrate at regular intervals with respect to one another forming hollow electrodes are coated with metal, and these hollow electrodes are supplied individually or as a group from one side of the substrate with an electrical excitation in the GHz-region, wherein the metallic walls of the hollow electrodes are provided with an insulating coating.
Dependencies are inferred from the claim text.