Piezoelectric pump
AssigneeMurata Manufacturing Co., Ltd.
InventorShungo KANAI
Life of this patent
Estimating the term…
Abstract
A piezoelectric pump includes a diaphragm that defines a pump chamber between the diaphragm and a pump body, and a piezoelectric element bonded to a surface of the diaphragm. The piezoelectric element is a bimorph piezoelectric element in which a plurality of piezoelectric layers are stacked, including a neutral layer disposed in the approximate middle of the piezoelectric element in the thickness direction and that is not displaced. The piezoelectric element can be efficiently displaced because a neutral plane of the diaphragm and the piezoelectric element bonded therein is located in the neutral layer.
Claims3
A piezoelectric pump comprising:
- a pump body including an opening;
- a diaphragm fixed to the pump body and arranged to close the opening, the diaphragm defining a pump chamber between the diaphragm and the pump body;
- and
- a piezoelectric element bonded to a surface of the diaphragm;
- wherein
- the diaphragm and the piezoelectric element being bonded to each other so as to define a diaphragm unit;
- the diaphragm unit is arranged to bend when a voltage is applied to the piezoelectric element;
- the piezoelectric element is a bimorph piezoelectric element in which a plurality of piezoelectric layers are stacked;
- at least one of the plurality of piezoelectric layers that is disposed in the approximate middle of the piezoelectric element in the thickness direction is a neutral layer that is not displaced when a voltage is applied;
- and
- a neutral plane of the diaphragm unit is located in the neutral layer of the piezoelectric element.
Dependencies are inferred from the claim text.