Vertical/horizontal small angle x-ray scattering apparatus and method for measuring small angle x-ray scattering

Abstract

A vertical/horizontal small angle X-ray scattering apparatus, for enabling plural numbers of X-ray diffraction measurements, such as, transmission small angle X-ray diffraction, reflection small angle X-ray diffraction, and in-plane X-ray diffraction, etc., comprises an X-ray generating apparatus 11 for generating X-ray, an optic system 16 for forming the X-ray into a predetermined incident beam of X-ray, a sample holder portion 120 for mounting a sample to be measured thereon, to irradiate the incident beam of X-ray thereupon, a vacuum path 17 for passing through small angle X-ray from the sample, and an X-ray detector 18 for detecting the small angle X-ray passing through the vacuum path, wherein the sample holder portion is fixed on a support base 110, while attaching the X-ray generating apparatus, the optic system, the vacuum path and the X-ray detector on a bench 100, as well, to be rotatable around the sample holder portion, and thereby enabling plural numbers of measurements of small angle X-ray scattering.

Dependencies are inferred from the claim text.