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AssigneeInternational Business Machines Corporation
InventorsJonghae Kim, Moon J. Kim, Jean-Oliver Plouchart, Robert E. Trzcinski
Estimating the term…
One or more on-chip VNCAP or MIMCAP capacitors utilize a variable MOS capacitor to improve the uniform capacitance value of the capacitors. This permits the production of silicon semiconductor chips on which are mounted capacitors having capacitive values that are precisely adjusted to be within a range of between about 1% and 5% of their design value. This optimization can be achieved by the use of a back-to-back connection between a pair of the variable MOS capacitors for DC decoupling. It involves the parallelization of on-chip BEOL capacitance of VNCAP and/or MIMCAP capacitors by the insertion in the FEOL of pairs of back-to-back variable MOS capacitors.
In a capacitive circuit assembly, a method for adjusting the capacitance of at least one on-chip fixed value capacitor selected from the group of a MIMCAP capacitor and a VNCAP capacitor, connecting a pair of variable MOS sub-capacitors in series with one another and in parallel with said at least one fixed value capacitor, and adjusting the value of the MOS capacitors until the total capacitance is within a target range.
A method of adjusting the value of a fixed value capacitor circuit mounted on a semiconductor chip including a pair of adjustable sub capacitors connected back-to-back with one another, and in parallel with at least one fixed value capacitor in said capacitor circuit, wherein said at least one fixed value capacitor is selected from the group consisting of a VNCAP and a MIMCAP, wherein the value of each said fixed value capacitor is within a range of ±10% of design value before adjustment of the adjustable sub capacitors and within a range of between 1% and 5% of design value after adjustment.
Dependencies are inferred from the claim text.