Lithographic Apparatus with Temperature Sensor and Device Manufacturing Method
AssigneeASML Netherlands B.V.
InventorsTjarko Adriaan Rudolf VAN EMPEL, Paulus Bartholomeus Johannes SCHAAREMAN
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Abstract
In an embodiment, a lithographic apparatus is arranged to transfer a pattern from a patterning device onto a substrate, wherein the lithographic apparatus includes an air shower and a temperature sensor positioned near the air shower for measuring the temperature of an air stream in the air shower. The temperature sensor is a thermocouple sensor, e.g., of a thermopile arrangement type. The thermocouple sensor includes a plurality of thermocouples in series, wherein a cold junction and a hot junction are provided, the cold junction being connected to a heat sink, and the hot junction being positioned into the air stream of the air shower.
Claims16
A lithographic apparatus arranged to transfer a pattern from a patterning device onto a substrate, wherein the lithographic apparatus comprises an air shower and a temperature sensor positioned near the air shower for measuring a temperature of an air stream in the air shower, wherein the temperature sensor is a thermocouple sensor.
A device manufacturing method comprising:
- transferring a pattern from-a patterning device onto a substrate;
- providing an air shower including an air stream;
- and
- measuring a temperature of an air stream in the air shower using a temperature sensor, wherein the temperature sensor is a thermocouple sensor.
A method of measuring a temperature in a lithographic apparatus, comprising:
- measuring a temperature of an air stream in an air shower of the lithographic apparatus, wherein the measuring comprises sensing the temperature with a thermocouple sensor.
Dependencies are inferred from the claim text.