Method of manufacturing an actuator apparatus, a method of manufacturing a liquid jet head and a liquid jet apparatus
AssigneeSeiko Epson Corporation
InventorsMasato Shimada, Kazushige Hakeda, Tsutomu Nishiwaki, Eiju Hirai
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Abstract
A method of manufacturing an actuator apparatus includes forming, on the base plate, a test pattern that is electrically discontinuous with the electrodes of the piezoelectric element and has the same layer as the lower electrode, the test pattern having the lower electrode with the upper electrode and the piezoelectric material layer removed by etching, and measuring electric resistance of the lower electrode of the test pattern to acquire the etch amount of the lower electrode when the piezoelectric element is formed.
Claims8
A method of manufacturing an actuator, the method comprising:
- laminating a lower electrode, a piezoelectric material layer, and an upper electrode on one surface of a base plate;
- simultaneously etching the upper electrode and the piezoelectric material layer to form a piezoelectric element;
- forming, on the base plate, a test pattern that is electrically discontinuous with the electrodes of the piezoelectric element and has the same layer as the lower electrode, the test pattern having the lower electrode with the upper electrode and the piezoelectric material layer removed by etching;
- and
- measuring electric resistance of the lower electrode of the test pattern to acquire an etch amount of the lower electrode when the piezoelectric element is formed.
Dependencies are inferred from the claim text.