Resonator and bandpass filter having overlay electromagnetic bandgap (ebg) structure, and method of manufacturing the resonator

A resonator having an overlay electromagnetic bandgap (EBG) structure, comprising:

• a transmission line through which a signal flows;
• a plurality of ground plates formed in both sides of the transmission line;
• and
• a plurality of reflectors, each including a plate which is separated from the transmission line and whose portions face the plurality of ground plates, and an interconnecting via for connecting the plate to the transmission line,
• wherein the plurality of reflectors are arranged at regular intervals along a longitudinal direction of the transmission line, and at least one reflector among the plurality of reflectors arranged at regular intervals is removed.

A bandpass filter formed by connecting a plurality of resonator units in series, each resonator unit comprising:

• the transmission line through which a signal flows;
• a plurality of ground plates formed in both sides of the transmission line;
• a plurality of reflectors whose portions face the plurality of ground plates to form capacitance components, and formed at regular intervals along a longitudinal direction of the transmission line;
• and
• a resonating part resonating the signal flowing through the transmission line, and formed by adjusting at least one interval among intervals between the plurality of reflectors.

A method of manufacturing a resonator having an overlay electromagnetic bandgap (EBG) structure, comprising:

• depositing a first metal layer on a substrate and etching the first metal layer to form a transmission line and a plurality of ground plates in both sides of the transmission line;
• applying an insulating film on the transmission line and the ground plates;
• and
• depositing a second metal layer on the insulating film and etching the second metal layer to form a plurality of reflectors at regular intervals along a longitudinal direction of the transmission line, wherein at least one interval among the regular intervals between the plurality of reflectors is formed wider than the remaining intervals between the plurality of reflectors.