Mems oscillator
AssigneeSeiko Instruments Inc.
InventorKensuke OGASAWARA
Life of this patent
Estimating the term…
Abstract
Provided is a MEMS oscillation circuit which performs temperature compensation of a MEMS resonator with a simple circuit, which is mild so that an output clock does not have jitter, and which makes the range of fluctuations of a reference frequency from a reference value equivalent to a range of digital processing. The MEMS oscillator includes a MEMS resonator, a temperature measurement unit for measuring a temperature and outputting a detected voltage corresponding to the temperature, and a bias voltage control circuit for applying the MEMS resonator with a bias voltage which changes the resonant frequency of the MEMS resonator in a manner opposite to a change of the resonant frequency of the MEMS resonator due to temperature change correspondingly to the detected voltage.
Claims16
An MEMS oscillator comprising:
- an MEMS resonator configured to oscillate at a resonant frequency which is a function of a bias voltage applied to the MEMS resonator;
- a temperature sensor configured to output a signal indicative of a temperature of the MEMS resonator;
- a bias voltage controller configured to apply the bias voltage determined based on the signal from the temperature sensor to compensate a change of the resonant frequency caused by a change of the temperature.
A method for compensating a change of a resonance frequency of an MEMS oscillator caused by a change of a temperature, comprising:
- providing an MEMS resonator configured to oscillate at a resonant frequency which is a function of a bias voltage applied to the MEMS resonator;
- measuring a temperature of the MEMS resonator and outputting a temperature signal indicative of the temperature of the MEMS resonator;
- and
- applying the bias voltage determined based on the temperature signal to compensate the change of the resonant frequency caused by the change of the temperature.
Dependencies are inferred from the claim text.