Probe of cantilever probe card

Abstract

A probe of a cantilever probe card (Epoxy probe card) is disclosed. The probe has a tip and a surface region extended from the tip of the probe about 5-10 mil is coated with a nano-film of high electro-conductive nanomaterial. The thickness of the nano-film is about 1-20 nm. Through the coating process, the nano-film coated on the probe of the cantilever probe card can efficiently provide the excellent advantages of no-clean, stable electro-conductivity, minimum overdrive force and longer usage lifetime for the probe of cantilever probe card. Accordingly, the yield of wafer testing can be improved and the frequency of cleaning the probe can be decreased. Furthermore, the total testing cost can be reduced.

Dependencies are inferred from the claim text.