Probe of vertical probe card
AssigneeIpworks Technology Corp.
InventorsBeen-long Chen, Huang-chih Chen
Life of this patent
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Abstract
A probe of a vertical probe card is disclosed. The probe has a probe tip and a surface region extended from the probe tip about 1-10 mil. The surface region is coated with a nano-film of high electro-conductive nano-material, and the thickness of the nano-film is about 1-20 nm. The nano-film of the probe can efficiently provide excellent no-clean property and higher electro-conductivity for lowering contact force and elongating usage lifetime of the probe of vertical probe card. Accordingly the yield of wafer testing can be improved, the frequency of cleaning probe can be lowered, and the total testing cost can be reduced.
Claims13
A probe of a vertical probe card, comprising:
- at least one probe made of a metal material and mounted on a vertical probe card;
- and
- a nano-film of electro-conductive nano-material coated on each of the at least one probe.
Dependencies are inferred from the claim text.