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US 2009/0212795 A1Published application
Probe card with segmented substrate
AssigneeSV Probe Pte. Ltd.
InventorScott R. Williams
Life of this patent
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Abstract
A probe card for testing of semiconductor dice is provided. The probe card includes a mounting plate and a plurality of substrate segments supported by the mounting plate.
Claims21
A probe card comprising:
- a mounting plate;
- and
- a plurality of substrate segments supported by the mounting plate.
A probe card comprising:
- a printed circuit board including a plurality of conductive pads;
- and
- a probe substrate supporting a plurality of probe elements, the probe elements being conductively coupled to respective ones of the plurality of conductive pads, the probe substrate including a plurality of substrate segments.
Dependencies are inferred from the claim text.