Equivalent-capacitance type actuator drive device

Abstract

[Problem]To provide an actuator drive device that eliminates the need for high voltage amplifiers. [Means for Solving Problem]The electrostatic actuator drive device comprises a variable capacitor 12 connected in series with an electrostatic actuator 10, and a constant voltage source 11 for applying a constant voltage between the both ends of the serial connected electrostatic actuator 10 and the variable capacitor 12. The capacitance of the variable capacitor 12 is varied under control of a controller 14 for adjusting the voltage to be applied to the electrostatic actuator 10. The constant voltage source 11 may be any forms to apply a constant high voltage. The electrostatic actuator 10 is equivalently a capacitor. In this device, the capacitance of one of series connected two capacitors is varied for adjusting the voltage to be applied to the other capacitor, or the electrostatic actuator 10. The drive device does not use expensive high voltage amplifiers, is simple in construction and is able to quickly control the voltage to be applied to the electrostatic actuator 10.

Dependencies are inferred from the claim text.