Semiconductor device and method for fabricating the same
AssigneesCHI MEI EL Corp., Chi Mei Optoelectronics Corp.
InventorsSeok-Woon Lee, Sung-Soo Park, Biing-Seng Wu
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Abstract
A semiconductor device, comprising a substrate, a semiconductive layer and a gate electrode is provided. The semiconductive layer having a crystallization promoting material is formed over the substrate. The semiconductive layer has a channel region, a first doped region and a second doped region. The first doped region has a donor and an acceptor, and the second doped region has a dopant which is selected from one of the donor and the acceptor. The second doped region is disposed between the first doped region and the channel region. The gate electrode is insulated from the channel region.
Claims33
A semiconductor device, comprising:
- a substrate;
- a semiconductive layer having a crystallization promoting material formed over the substrate, the semiconductive layer having:
- a channel region;
- a first doped region having a donor and an acceptor;
- and
- a second doped region having a dopant which is selected from one of the donor and the acceptor, wherein the second doped region is disposed between the first doped region and the channel region;
- and
- a gate electrode insulated from the channel region.
A method of fabricating a semiconductor device, comprising:
- providing a substrate;
- forming a semiconductive layer having a crystallization promoting material on the substrate;
- forming a channel region, a first doped region, and a second doped region in the semiconductive layer, the second doped region positioned between the first doped region and the channel region, wherein the first doped region has two dopants including a donor and a acceptor, the second doped region has a dopant selected from one of the donor and the acceptor;
- forming a gate electrode insulated from the channel region;
- and
- recovering the semiconductor device with a heat treatment so as to allow the crystallization promoting material to be moved away from the channel region.
Dependencies are inferred from the claim text.