Radiation image detection apparatus and manufacturing method of radiation image detector
AssigneeFUJIFILM Corporation
InventorsFumito NARIYUKI, Munetaka Kato, Keiichiro Sato
Life of this patent
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Abstract
In a radiation image detection apparatus having a radiation image detector that includes the following stacked in the order listed below: a bias electrode, a photoconductive layer, a substrate side charge transport layer, and an active matrix substrate, the radiation image detector does not include an area adjacent to the interface between the substrate side charge transport layer and photoconductive layer having an oxygen or chlorine element density not less than two times the average density of oxygen or chlorine element in the substrate side charge transport layer.
Claims13
A radiation image detection apparatus, comprising a radiation image detector that includes the following stacked in the order listed below:
- a bias electrode to which a bias voltage is applied;
- a photoconductive layer that generates electric charges by receiving a recording electromagnetic wave representing a radiation image;
- a substrate side charge transport layer that transports the electric charges generated in the photoconductive layer;
- and
- an active matrix substrate having multiple charge collecting electrodes disposed thereon for collecting the electric charges generated in the photoconductive layer,
- wherein the radiation image detector does not include an area adjacent to the interface between the substrate side charge transport layer and photoconductive layer having an oxygen or chlorine element density not less than two times the average density thereof in the substrate side charge transport layer.
A manufacturing method of a radiation image detector that includes the following stacked in the order listed below:
- a bias electrode to which a bias voltage is applied;
- a photoconductive layer that generates electric charges by receiving a recording electromagnetic wave representing a radiation image;
- a substrate side charge transport layer that transports the electric charges generated in the photoconductive layer;
- and an active matrix substrate having multiple charge collecting electrodes disposed thereon for collecting the electric charges generated in the photoconductive layer, the method comprising the steps of:
- forming the substrate side charge transport layer on the active matrix substrate in a vacuum chamber;
- and
- without exposing the substrate side charge transport layer to gas that includes oxygen or water, forming thereon the photoconductive layer.
A manufacturing method of a radiation image detector that includes the following stacked in the order listed below:
- a bias electrode to which a bias voltage is applied;
- a photoconductive layer that generates electric charges by receiving a recording electromagnetic wave representing a radiation image;
- a substrate side charge transport layer that transports the electric charges generated in the photoconductive layer;
- and an active matrix substrate having multiple charge collecting electrodes disposed thereon for collecting the electric charges generated in the photoconductive layer, the method comprising the steps of:
- forming the substrate side charge transport layer on the active matrix substrate in a vacuum chamber;
- exposing the substrate side charge transport layer to gas that includes oxygen or water and returning the layer to the vacuum chamber;
- and
- exposing the substrate side charge transport layer to an environmental temperature not less than 100° C. and forming thereon the photoconductive layer.
Dependencies are inferred from the claim text.