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US 2009/0212039 A1Published application
Fluid Controlling Apparatus
AssigneeFujikin Incorporated
InventorIzuru Shikata
Life of this patent
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Abstract
There is provided a fluid controlling apparatus which can satisfactorily perform heating without enlarging an installation area. Heating means 3 comprises: a planar heater 21 interposed between a base member 2 and a lower layer 5; and heat conduction enhancing spacers 22 interposed between interrupting releasers 15 and 17 disposed on an upper layer 4 and a mass flow controller 16, and the heater 21, respectively.
Claims3
A fluid controlling apparatus comprising:
- lines arranged in parallel on a base member, each of the lines including an upper layer having a plurality of fluid controlling devices and a lower layer having a plurality of block-like coupling members;
- and heating means for heating the coupling member and the fluid controlling device, the heating means including a planar heater interposed between the base member and the lower layer and at least one heat conduction enhancing spacer interposed between at least one of the fluid controlling devices on the upper layer and the heater.
Dependencies are inferred from the claim text.