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US 2009/0212037 A1Published application
Silver reflectors for semiconductor processing chambers
AssigneeApplied Materials, Inc.
InventorsJoseph M. Ranish, Kelly Churton, Mark E. Lindsay, Mischa Ann Plesha, Sage Berta
Life of this patent
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Abstract
A silver reflector for reflecting radiation from a lamp in a semiconductor processing chamber is disclosed. The reflector may be a sleeve to be disposed in a lightpipe or part of a lamphead. The silver may be in the form of a coating on the sleeve or the lamphead.
Claims20
A reflector for use in a semiconductor processing chamber, comprising:
- a reflector substrate disposed in the processing chamber to reflect radiation originating from a heating lamp mounted in the semiconductor processing chamber, the reflector substrate including a reflective layer disposed thereon comprising silver.
A semiconductor processing apparatus, comprising:
- a processing chamber having a support on which a substrate may be positioned during processing;
- a heating lamp radiating radiant energy;
- and
- a reflector positioned to reflect radiation from the lamp, the reflector including a reflective layer substantially made of silver on a reflector substrate.
1 more element
Dependencies are inferred from the claim text.