Plasma-Assisted Processing in a Manufacturing Line
OwnerMike L. Dougherty, SR., Devendra Kumar +1inventors
InventorsMike L. Dougherty, SR., Devendra Kumar, Satyendra Kumar
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Abstract
Methods and apparatus are provided for plasma-assisted processing multiple work pieces in a manufacturing line. The manufacturing line can include a plurality of microwave cavities, each of the microwave cavities igniting and sustaining a microwave plasma. Work pieces can be shuttled between the plurality of microwave cavities on a conveyance system that controls the positioning of each of the work pieces.
Claims28
A method of plasma-assisted processing a plurality of work pieces, the method comprising:
- placing each of the plurality of work pieces in a plurality of movable carriers;
- moving a first subset of movable carriers into a first irradiation zone with a conveyance system;
- flowing a gas into the first irradiation zone;
- igniting the gas in the first irradiation zone to form a first plasma;
- sustaining the first plasma for a period of time sufficient to at least partially plasma process work pieces in the first subset of movable carriers in the first irradiation zone;
- removing the first subset of movable carriers out of the first irradiation zone with the conveyance system;
- moving a second subset of movable carriers into a second irradiation zone with the conveyance system;
- and
- processing the second subset of movable carriers with a second plasma ignited in the second irradiation zone.
An apparatus for plasma-assisted processing a plurality of work pieces, the apparatus comprising:
- a first chamber, the first chamber coupled to receive a gas flow and radiation in order to ignite a first plasma within the first chamber;
- a second chamber, the second chamber coupled to receive a gas flow and radiation in order to ignite a second plasma within the second chamber;
- and
- a conveyance system coupled to shuttle work pieces in and out of each of the first chamber and the second chamber.
A reactor, comprising:
- a chamber coupled to receive microwave energy and gas flow;
- a cavity positioned in the chamber, and
- microwave absorbers positioned within the chamber to maximize microwave energy in the cavity, wherein
- a plasma can be ignited in the cavity in the presence of the gas and the microwave energy.
A reactor, comprising
- a chamber coupled to receive microwave energy and gas flow;
- a first cavity positioned in the chamber, and
- a second cavity positioned in the chamber, wherein
- a plasma can be ignited in both the first cavity and the second cavity in the presence of the gas and the microwave energy.
Dependencies are inferred from the claim text.