Method for manufacturing electrode foil
AssigneeFujitsu Limited
InventorsYoshihiko Imanaka, Hitoshi Yamada, Hideyuki Amada
Life of this patent
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Abstract
A method of manufacturing a electrode foil composed of a valve metal layer of a first valve metal and a metal foil of a second valve metal supporting the valve metal layer, the method includes coating fine particles of the first valve metal with a resin to form composite fine particles, forming the composite fine particles into an aerosol, jetting the aerosol to the metal foil in an atmosphere under a reduced pressure, depositing the composite fine particles onto the metal foil to form a aerosol deposition layer, and removing selectively the resin from the aerosol deposition layer to form the valve metal layer.
Claims15
A method of manufacturing a electrode foil composed of a valve metal layer of a first valve metal and a metal foil of a second valve metal supporting the valve metal layer, comprising:
- coating fine particles of the first valve metal with a resin to form composite fine particles;
- forming the composite fine particles into an aerosol;
- jetting the aerosol to the metal foil in an atmosphere under a reduced pressure;
- depositing the composite fine particles onto the metal foil to form a aerosol deposition layer;
- and
- removing selectively the resin from the aerosol deposition layer to form the valve metal layer.
A method of manufacturing a electrode foil composed of a valve metal layer formed with a plurality of first fine particles composed of the first valve metal and a metal foil of a second valve metal supporting the valve metal layer, comprising:
- forming a mixture composed of the plurality of first fine particles and a plurality of fine resin particles;
- forming the mixture into an aerosol;
- jetting the aerosol to the metal foil in an atmosphere under a reduced pressure;
- depositing each of the plurality of first fine particles and the plurality of fine resin particles onto metal foil to form a aerosol deposition layer;
- and
- removing selectively the plurality of fine resin particles from the a aerosol deposition layer to form the valve metal layer.
A method of manufacturing a electrode foil composed of a valve metal layer and a metal foil, the valve metal layer formed with a plurality of first fine particles composed of a first valve metal, the valve metal layer fixed to the metal foil composed of a second metal valve, comprising:
- coating the first valve metal with a first resin to form the first fine particles;
- forming a mixture composed of the plurality of first fine particles and a plurality of second fine particles, the second fine particle composed of a ceramic coated with a second resin and having a smaller diameter than a diameter of one of the first fine particles, the ceramic having a higher dielectric constant than that of an oxide film formed by performing a chemical conversion treatment on the first valve metal;
- forming the mixture into an aerosol;
- jetting the aerosol to the metal foil in a atmosphere with a reduced pressure;
- fixing each of the plurality of first fine particles and the plurality of second fine resin particles each other to form a aerosol deposition layer and to fix the aerosol deposition layer to the metal foil;
- removing selectively the first resin and the second resin from the a aerosol deposition layer to form the valve metal layer and to form a plurality of voids in the valve metal layer.
Dependencies are inferred from the claim text.