Liquid ejection head and manufacturing method thereof
AssigneeCanon Kabushiki Kaisha
InventorsMasaya Uyama, Makoto Terui, Kazuhiro Hayakawa
Life of this patent
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Abstract
A liquid ejection head includes a substrate, having a front surface and a back surface, provided on the front surface with an energy generating element for generating energy used for ejecting liquid; a supply port, provided so as to penetrate between the front surface and the back surface of the substrate, for supplying the liquid to the energy generating element; a first film provided on the front surface of the substrate; and a second film provided so as to coat a wall of the substrate defining the supply port. The first film and the second film surface-contact each other with respect to two directions substantially perpendicular to each other.
Claims6
A liquid ejection head comprising:
- a substrate, having a front surface and a back surface, provided on the front surface with an energy generating element for generating energy used for ejecting liquid;
- a supply port, provided so as to penetrate between the front surface and the back surface of said substrate, for supplying the liquid to the energy generating element;
- a first film provided on the front surface of said substrate;
- and
- a second film provided so as to coat a wall of said substrate defining said supply port,
- wherein said first film and said second film surface-contact each other with respect to two directions substantially perpendicular to each other.
A manufacturing method of a liquid ejection head including a substrate, having a front surface and a back surface, provided on the front surface with an energy generating element for generating energy used for ejecting liquid;
- and a supply port, provided so as to penetrate between the front surface and the back surface of said substrate, for supplying the liquid to the energy generating element;
- said manufacturing method comprising:
- providing a first film at a position, at least correspondingly to the supply port, on the front surface of the substrate;
- establishing communication between the supply port and a portion of the first film provided correspondingly to the supply port;
- providing a recess, recessed in a direction from the back surface toward the front surface, at the portion of the first film provided correspondingly to the supply port;
- and
- providing a second film so as to coat the recess and a wall of the surface defining the supply port.
Dependencies are inferred from the claim text.