Surface treatment method
AssigneeShinko Electric Industries Co., Ltd.
InventorsYuji Usui, Goshi Imai, Shigeki Ishitobi
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Abstract
According to the present invention, a plasma treatment process is performed for a surface of a metal film exposed through a resin layer, including a foreign resin substance attached to the surface, so that the foreign resin substance can be roughened without substantially damaging the resin layer; and the entire exposed surface of the metal film is etched, using a spray etching method for which an etching fluid is ejected through a nozzle, and the foreign resin substance is removed from the exposed surface.
Claims10
A surface treatment method comprising the steps of:
- preparing a surface of a metal film exposed through a resin layer, including a foreign resin substance attached to the surface;
- performing a plasma treatment process for the surface so as to roughen the foreign resin substance without substantially damaging the resin layer;
- and
- etching the entire exposed surface of the metal film, with using a spray etching method for which an etching fluid is ejected through a nozzle to remove the foreign resin substance from the exposed surface.
A surface treatment method comprising the steps of:
- preparing a surface of a metal film exposed through a resin layer, including a scratch formed on the surface, and
- etching the entire exposed surface of the metal film, with using a spray etching method for which an etching fluid is ejected through a nozzle to remove the scratch from the exposed surface.
Dependencies are inferred from the claim text.