Horizontal nanotube/nanofiber growth method
AssigneesSTMicroelectronics S.r.l., Commissariat a l'Energie Atomique
InventorsGerard Passemard, Sylvain Maitrejean, Valentina Ivanova-Hristova
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Abstract
A method for forming a nanotube/nanofiber growth catalyst on the sides of portions of a layer of a first material, comprising the steps of depositing a thin layer of a second material; opening this layer at given locations; depositing a very thin catalyst layer; depositing a layer of the first material over a thickness greater than that of the layer of the second material; eliminating by chem./mech. polishing the upper portion of the structure up to the high level of the layer of the second material; and eliminating the second material facing selected sides of the layer portions of the first material.
Claims9
A method for forming a nanotube/nanofiber growth catalyst on the sides of portions of a layer of a first material, comprising the steps of:
- depositing a layer of a first thickness of a second material;
- opening this layer at given locations;
- depositing a catalyst layer of a second thickness smaller than the first thickness;
- depositing a layer of the first material over a thickness greater than that of the. thin layer of the second material;
- eliminating by chem./mech. polishing the upper portion of the structure up to the high level of the layer of the second material;
- and
- eliminating the second material facing selected sides of the layer portions of the first material.
A method for forming a connection level of an integrated circuit comprising the steps of:
- depositing an insulating layer;
- opening this layer at the locations where a connection is desired to be established with a lower-level via and at end locations of rectilinear conductive tracks;
- depositing a nanotube/nanofiber growth catalyst layer;
- filling the openings with conductive pads;
- eliminating portions of the insulating layer in rectilinear regions extending between two opposite surfaces of conductive pads;
- and
- growing nanotubes/nanofibers.
Dependencies are inferred from the claim text.