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AssigneeKoninklijke Philips Electronics N.V.
InventorsPeter G. Steeneken, Jozef Thomas Martinus Van Beek, Theodoor Rijks
Estimating the term…
The electronic device comprising a micro-electromechanical systems (MEMS) element at a first side of a substrate (14). The MEMS element comprises a first electrode (101) and a second electrode (11), that is part of a movable element and movable towards and from the first electrode between a first and a second position. The second electrode (11) is separated from the first electrode (101) by an air gap (110) in its first position. The movable element comprises a mechanical layer (12) and an intermediate layer, in which the second electrode (11) is defined. The second electrode (11) is constituted by a plurality of sections (131, 132, 133) in the intermediate layer, each of which is mechanically connected by a separate vertical interconnect (121, 122, 123) to the mechanical layer (12).
An electronic device comprising a micro-electromechanical systems element, which MEMS element comprises a first electrode and a second electrode, that is part of a movable element and movable towards and from the first electrode between a first and a second position, and that is separated from the first electrode by a gap in its first position, which movable element comprises a mechanical layer and an intermediate layer in which the second electrode is defined,
Dependencies are inferred from the claim text.