# US 2009/0211437 A1 · Apparatus and Method for increasing the selectivity of fet-based gas sensors > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2009/0211437 A1 - Document ID: US20090211437A1 - Status: Published application - Kind: A1 - Application number: 11/587,171 - Filed: 2005-04-21 - Published: 2009-08-27 - Earliest claimed: 2004-04-22 - Assignees: Micronas GmbH - Inventors: Maximilian Fleischer; Uwe Lampe; Hans Meixner; Roland Pohle; Ralf Schneider; Elfriede Simon - Web page: https://patentgrep.com/patent/US20090211437A1 ## CPC - G01N 33/0014: {by eliminating a gas (by a chemical reaction G01N33/0013; a chemical reaction taking place or a gas being eliminated in one or more analysing channels G01N33/0024)} - G01N 27/4143: {Air gap between gate and channel, i.e. suspended gate [SG] FETs (work function measurement per se G01N27/002)} - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract A FET gas sensor having a relatively low operating temperature, for example, room temperature, is free from cross sensitivities from interfering gases by a preceding in-line filter. The sensor's service life is substantially stabilizable by using fabric-like activated charcoal filters which can be regenerated by a moderate temperature increase, and by limiting the diffusion of the analyte gas, which is made possible by the relatively small amount of gas detectable on the sensitive layer of the sensor. This substantially increases the service life of the filters. The gas sensor eliminates cross sensitivities to thereby increase the detection reliability thereof. Also, the gas sensor has relative long term stability and is economical to build. The gas sensor can read relatively weak signals generated by gas-sensitive layers, for example, without other stronger gas signals interfering with the weak signals. ## Claims ### Claim 1 A method for increasing the selectivity of an FET-based gas sensor having a filter permeable to a target gas and which adsorbs gases on a surface of the filter that cause cross sensitivities to the target gas, where the filter is disposed between a gas mixture to be detected and a sensing element of the gas sensor, and where the filter comprises fabric-like activated charcoal, the method comprising the step of heating the sensor to a temperature at which the adsorbed gases are driven off the filter surface to thereby regenerate the filter. ### Claim 2 A method for increasing the selectivity of an FET-based gas sensor having a filter permeable to the target gas and which adsorbs gases on a surface of the filter that cause cross sensitivities to the target gas, where the filter is disposed between a gas mixture to be detected and a sensing element of the gas sensor, the method comprising the step of reducing diffusion of the gas mixture to the filter by a predetermined amount that delays saturation of the filter by a predetermined time period. ### Claim 3 (depends on 1) The method of claim 1, where an operating temperature of the gas sensor is in the range between room temperature and about 100° C. ### Claim 4 (depends on 1) The method of claim 1, where the filter is positioned at a predetermined physical distance from the sensing element. ### Claim 5 (depends on 1) The method of claim 1, where the fabric-like activated charcoal material comprises viscose cellulose produced by carbonization. ### Claim 6 (depends on 1) The method of claim 1, where the filter physically absorbs gases on a surface of the filter that cause cross sensitivities to the target gas. ### Claim 7 (depends on 1) The method of claim 1, where the step of heating the sensor comprises the step of heating both the filters and the sensing element. ### Claim 8 (depends on 1) The method of claim 1, where the step of heating the sensor is carried out at a temperature of 100° C. above the operating temperature of the sensor. ### Claim 9 (depends on 1) The method of claim 1, where the step of heating the sensor is carried out in a temperature range of about 150-300° C. ### Claim 10 (depends on 1) The method of claim 1, where the step of heating the sensor is controlled automatically. ### Claim 11 (depends on 2) The method of claim 2, where the step of reducing diffusion of the gas mixture is carried out by one of the steps of providing an aperture in a gas-tight sensor housing, by providing a gas-permeable membrane in the gas sensor, and by providing a diffusion gap in the gas sensor. ### Claim 12 (depends on 1) The method of claim 1, where the filter comprises multiple layers of the fabric-like activated charcoal. ### Claim 13 (depends on 1) The method of claim 1, where the filter is impregnated with the gas mixture. ### Claim 14 (depends on 1) The method of claim 1, where the filter comprises a buffers for moisture. ### Claim 15 (depends on 1) The method of claim 1, where an output signal from the gas sensor is used to control a duration of the step of heating. ### Claim 16 (depends on 1) The method of claim 1, where an output signal from the gas sensor is used during the step of heating to perform a self-test of the sensor. ### Claim 17 An FET gas sensor, comprising: a filter permeable to a target gas and which adsorbs gases on a surface of the filter; a sensing element, where the filter is disposed between a gas mixture to be detected and the sensing element; and a heater that heats the filter to a temperature at which the absorbed gases are driven off the filter surface to thereby regenerate the filter. ### Claim 18 An FET gas sensor, comprising: a filter permeable to a target gas and which absorbs gases on a surface of the filter; a sensing element, where the filter is disposed between a gas mixture to be detected and the sensing element; and means for reducing an amount of diffusion of the gas mixture that reaches the filter. ### Claim 19 (depends on 17) The FET gas sensor of claim 17, where the filter comprises activated charcoal. ### Claim 20 (depends on 18) The FET gas sensor of claim 18, where the means for reducing comprises one of an aperture in a gas-tight housing, a gas-permeable membrane in the gas sensor, and a diffusion gap in the gas sensor. ### Claim 21 An FET gas sensor, comprising: an activated charcoal filter that is permeable to a target gas and which absorbs non-target gases on a surface of the filter; a gas sensing element, where the filter is disposed between a gas mixture to be detected and the sensing element; and means for reducing an amount of diffusion of the gas mixture that reaches the filter.