Load sensor having load detection element and support element and method for manufacturing the same

A load sensor comprising:

• a load detection element;
• and
• a support element,
• wherein the support element includes a base and a spring,
• wherein the load detection element is mounted on one side of the base,
• wherein the spring includes a support portion for sandwiching the load detection element between the one side of the base and the support portion, a connection portion connecting to the base, and a connecting member for coupling the support portion and the connection portion,
• wherein the support portion includes a contact surface, which is plastically deformed,
• wherein the contact surface contacts the load detection element,
• wherein the spring is deformed so that the spring applies a preliminary load on the load detection element,
• wherein deformation of the spring provides to maintain the deformation of the connecting member within the elastic deformation region when a detection load has a predetermined variation range, and
• wherein the support element transmits the detection load to the load detection element via the base and the spring.

A method for manufacturing a load sensor including a load detection element and a support element, the method comprising:

• mounting the load detection element on one side of a base of the support element;
• sandwiching the load detection element between the one side of the base and a support portion of a spring of the support element;
• applying a first preliminary load on the load detection element via the support portion of the spring so that a dent is formed on a contact surface of the support portion, wherein the contact surface contacts the load detection element;
• applying a second preliminary load on a connection portion of the spring so that the connection portion contacts the base so that a connecting member of the spring is deformed beyond the elastic deformation region to reach the plastic deformation region, wherein the connecting member couples the support portion and the connection portion;
• bonding the base and the connection portion;
• applying a third preliminary load on the support portion via the support portion so that the contact surface of the support portion is plastically deformed and the dent on the contact surface becomes large;
• and
• returning deformation of the connecting member to be in the elastic deformation region,
• wherein the support element transmits a detection load to the load detection element via the base and the spring.