Manufacturing method of vacuum airtight container
AssigneeCanon Kabushiki Kaisha
InventorsTokutaka Miura, Mitsutoshi Hasegawa, Yoichi Ando
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AssigneeCanon Kabushiki Kaisha
InventorsTokutaka Miura, Mitsutoshi Hasegawa, Yoichi Ando
Estimating the term…
To provide a method of manufacturing a vacuum airtight container, capable of activating a non-evaporable getter having a different activation temperature, without providing a process of giving external energy other than heat to be used in a baking process, the method of manufacturing the vacuum airtight container according to the present invention includes STEP 2 of activating only a first NEG by increasing a temperature in a decompression atmosphere up to a temperature T1 at which the first NEG is activated, and also includes STEP 4 of activating, after activating the first NEG, a second NEG by increasing the temperature in the decompression atmosphere up to a temperature T2 at which the second NEG is activated. The STEP 2 and the STEP 4 end in a baking step.
A manufacturing method of a vacuum airtight container, the method comprising a baking step of baking, in a decompression atmosphere, a container in which a first non-evaporable getter and a second non-evaporable getter having an activation temperature higher than that of the first non-evaporable getter are disposed, wherein
Dependencies are inferred from the claim text.