Photosensitive Resin Composition and Photosensitive Film
AssigneeAsahi Kasei Kabushiki Kaisha
InventorsKuon Miyazaki, Takashi Hayakawa
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Abstract
Disclosed is a photosensitive resin composition comprising an alkali-soluble resin, wherein the dissolution rate of the alkali-soluble resin in an aqueous sodium carbonate solution is not less than 0.04 μm/sec. When a photosensitive layer having a thickness of 30 μm is formed by applying the photosensitive resin composition onto a base and removing the solvent by heating, and thus-obtained photosensitive layer is irradiated with an active ray of 1000 mJ/cm2 or less, the dissolution rate of the portion irradiated with the active ray in the photosensitive layer made of the photosensitive resin composition is not less than 0.22 μm/sec and the film residual rate of the portion not irradiated with the active ray is not less than 90%.
Claims35
A photosensitive resin composition comprising an alkali-soluble resin which is characterized in that:
- the dissolution rate of said alkali-soluble resin in an aqueous sodium carbonate solution is 0.04 μm/sec or higher;
- when an active ray of 1000 mJ/cm2 or less is irradiated to a photosensitive layer with a film thickness of 30 μm obtained after the application of said photosensitive resin composition on the substrate and desolvation by heating, the dissolution rate of the portion irradiated with the active ray in the photosensitive layer made of the photosensitive resin composition is 0.22 μm/sec or higher;
- and the film residual rate of the portion not irradiated with the active ray is 90% or more.
A photosensitive resin composition comprising at least (A′) a polyamide acid represented by formula (8), (B) a dissolution suppressing agent, (C) a photosensitizing agent, and (D) an organic solvent (excluding the compound which is identical to the one constituting (B)):
- in formula (8), R25 represents a tetravalent organic group having two or more carbons, and R26 represents a divalent organic group having two or more carbons.
Dependencies are inferred from the claim text.