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AssigneeSiltronic AG
InventorsBurkhard ALTEKRUGER, Stefan Henkel, Axel Vonhoff, Erich Tomzig, Dieter Knerer
Estimating the term…
A pulling apparatus and a method with which especially heavy crystals (5) can be pulled using the Czochralski method utilizing the pulling apparatus. For this purpose the neck (4) of the crystal (5) has an enlargement (10) beneath which extends the support device. This device includes latches (7), which are moved from a resting position into an operating position in which the latches (7) extend beneath the enlargement (10). Each latch (7) is supported on the base body such that it is swivellable about a pivot axis (8) and can assume two stable positions, namely the resting position and the operating position. Each of these positions is defined by a stop on the base body. When the latch rests on the one stop, its center of gravity, viewed from the neck (4), is located on the other side of the pivot axis (8). When the latch rests on the other stop, the center of gravity is located on this side of the pivot axis (8). The actuation of the latches (7) takes place with actuation means disposed stationarily in the apparatus.
1-17. (canceled)
A method comprising producing crystals using the Czochralski method wherein a crystal pulling apparatus beneath an enlargement in the neck region of the crystal extends a support device with latches for relieving the neck region of the crystal of load and the extending of the latches beneath the enlargement is mechanically actuated, comprising activating the extending of the latches through mechanical contact between the latches and actuation elements which are supported on a housing of the crystal pulling apparatus.
Dependencies are inferred from the claim text.