Server and program

A server device constituting a group management system, which includes a plurality of manufacturing apparatuses for performing a preset process on a target substrate and the server device connected with the plurality of manufacturing apparatuses and has a function of performing a fault detection, the server device comprising:

• a measurement information storage unit for storing therein plural measurement information, which is time sequential information measured in the plurality of manufacturing apparatuses and has a product wafer number, which is the number of wafers from which a dummy wafer number is subtracted and is the number of product wafers to be manufactured in the manufacturing apparatuses, and time information indicating time;
• an instruction receiving unit for receiving an output instruction for output information, which contains a product wafer number condition related to the product wafer number;
• a condition information storage unit for storing therein condition information indicating conditions for determining whether the measurement information has a fault;
• a fault detection unit for, when the instruction receiving unit receives the output instruction, reading a multiplicity of measurement information satisfying the product wafer number condition contained in the output instruction from the measurement information storage unit, and determining whether the read multiplicity of measurement information satisfies the condition information;
• an output information composing unit for composing the output information according to a determination result of the fault detection unit;
• and
• an output unit for outputting the output information composed by the output information composing unit.