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OwnerMatthew Fenton Davis, Lei Lian +3inventors
InventorsMatthew Fenton Davis, Lei Lian, Vivien Chang, Sandy M. Wen, Mikhail Taraboukhine
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Embodiments described herein generally relate to a method of updating a software routine with subprograms and subroutines that can be accessed by an end user on an as-needed basis. In one embodiment, a method of providing a control function for a semiconductor process to a pre-existing software architecture is described. The method includes providing a plug-in to the pre-existing software architecture, providing an upgrade library file having the control function therein, and uploading the upgrade library file to the pre-existing software architecture at the plug-in to facilitate process control of the semiconductor process.
A method of providing a control function for a semiconductor process to a pre-existing software architecture, the method comprising:
A method of providing an upgraded control function for a semiconductor process to a pre-existing software architecture in communication with a plasma chamber, the method comprising:
A computer-readable medium comprising a first set of equations for control of a semiconductor process and configured to replace a second set of equations executed by a semiconductor processing tool processor, wherein the first set of equations are bundled into a dynamic linked library (DLL).
Dependencies are inferred from the claim text.